kentaro Tokoro

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Speaker, Author, Co-Author

Wed. Sep 14, 2016 1:30 PM - 3:30 PM P10 (Exhibition Hall)

Poster presentation
| Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| Joint Session K "Wide bandgap oxide semiconductor materials and devices"（Poster）

[14p-P10-1~25] Joint Session K "Wide bandgap oxide semiconductor materials and devices"（Poster）

1:30 PM - 3:30 PM

[14p-P10-19] Room-temperature atomic layer deposition of SnO₂by using plasma-excited humidified argon

〇kentaro Tokoro¹, Syunsuke Saito¹, Kensaku Kanomata¹, Masanori Miura¹, Bashir Ahmmad¹, Shigeru Kubota¹, Fumihiko Hirose¹ (1.Yamagata Univ.)