The 77th JSAP Autumn Meeting, 2016

Kazushi Miki

Speaker, Author, Co-Author

Wed. Sep 14, 2016 12:30 PM - 7:15 PM B7 (Exhibition Hall)

  • Symposium (Oral)
  • | Symposium
  • | Crystallization of IV element Semiconductor thin-film and Deffects control

Wed. Sep 14, 2016 1:30 PM - 3:30 PM P5 (Exhibition Hall)

  • Poster presentation
  • | 13 Semiconductors
  • | 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology