Hitoshi Habuka

→ Search for Hitoshi Habuka in Google Scholar

Speaker, Author, Co-Author

Thu. Sep 15, 2016 9:00 AM - 12:15 PM C302 (Nikko Houou)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[15a-C302-1~12] 15.6 Group IV Compound Semiconductors (SiC)

11:45 AM - 12:00 PM

[15a-C302-11] Formation and Removal of Carbon Film on Silicon Carbide Surface Using Chlorine Trifluoride Gas

Asumi Hirooka¹, 〇Hitoshi Habuka¹, Yoshinao Takahashi², Tomohisa Kato³ (1.Yokohama Nat. Univ., 2.Kanto Denka Kogyo, 3.AIST)