Mitsuki Kuwabara

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 9:00 AM - 12:45 PM B4 (Exhibition Hall)

Oral presentation
| 3 Optics and Photonics
| 3.11 Photonic structures and phenomena

[16a-B4-1~13] 3.11 Photonic structures and phenomena

10:15 AM - 10:30 AM

△ [16a-B4-5] An integrated chip of the high-Q nanocavities for 1310/1550 nm bands

〇(M1)Mitsuki Kuwabara¹, Yasushi Takahashi¹, Susumu Noda² (1.Osaka Pref. Univ., 2.Kyoto Univ.)

Thu. Sep 15, 2016 1:45 PM - 6:30 PM B10 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[15p-B10-1~17] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

2:30 PM - 2:45 PM

[15p-B10-3] Sub-nanometer precision wet etching process of the SOI substrate

〇(M1)Mitsuki Kuwabara¹, Yasushi Takahashi¹ (1.Osaka Pref. Univ.)