Lun Xu

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:15 PM - 5:45 PM B9 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[15p-B9-1~17] 13.3 Insulator technology

1:45 PM - 2:00 PM

▲ [15p-B9-3] Study of polarization uniformity in N-doped ferroelectric HfO₂ by piezo-response force microscopy

〇(D)Lun Xu¹, Shigehisa Shibayama¹, Tomonori Nishimura¹, Takeaki Yajima¹, Shinji Migita², Akira Toriumi¹ (1.The Univ. of Tokyo, 2.AIST)