The 77th JSAP Autumn Meeting, 2016

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[15p-B9-1~17] 13.3 Insulator technology

Thu. Sep 15, 2016 1:15 PM - 5:45 PM B9 (Exhibition Hall)

Tsutomu Tezuka(TOSHIBA), Toyohiro Chikyo(NIMS)

1:45 PM - 2:00 PM

▲ [15p-B9-3] Study of polarization uniformity in N-doped ferroelectric HfO2 by piezo-response force microscopy

〇(D)Lun Xu1, Shigehisa Shibayama1, Tomonori Nishimura1, Takeaki Yajima1, Shinji Migita2, Akira Toriumi1 (1.The Univ. of Tokyo, 2.AIST)

Keywords:HfO2, ferroelectric, piezo-response force microscopy