Chiaki Yokoyama

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:15 PM - 5:45 PM B9 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[15p-B9-1~17] 13.3 Insulator technology

2:45 PM - 3:00 PM

△ [15p-B9-7] In content dependence of Pre-treatment Effects for Al₂O₃/In_xGa_1-xAs MOS Interface Properties

〇(B)Chiaki Yokoyama¹, Chih-Yu Chang^1,2,3, Mitsuru Takenaka^1,2,3, Shinichi Takagi^1,2,3 (1.The Univ. of Tokyo, Faculty of Engineering, 2.The Univ. of Tokyo, School of Engineering, 3.JST-CREST)