Kana Hiramatsu

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:45 PM - 7:00 PM C302 (Nikko Houou)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[15p-C302-1~18] 15.6 Group IV Compound Semiconductors (SiC)

2:30 PM - 2:45 PM

△ [15p-C302-3] High Selectivity in SiC/SiO₂ Etching by ICP-RIE in a SF₆-O₂-Ar Chemistry

〇Kana Hiramatsu¹, Takafumi Okuda¹, Jun Suda¹, Tsunenobu Kimoto¹ (1.Kyoto Univ.)