Takayuki Uchida

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 9:00 AM - 11:45 AM A22 (Main Hall B)

Oral presentation
| Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[16a-A22-1~10] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

11:00 AM - 11:15 AM

△ [16a-A22-8] Fabrication and electrical property analysis of Si doped α-Ga₂O₃

〇Takayuki Uchida¹, Riena Jinno¹, Shu Takemoto¹, Kentaro Kaneko¹, Shizuo Fujita¹ (1.Kyoto Univ.)

11:15 AM - 11:30 AM

[16a-A22-9] Dry etching characteristic of α-(Al_xGa_1-x)₂O₃ thin films

〇Takayuki Uchida¹, Masayuki Nakamura², Kentaro Kaneko¹, Riena Jinno¹, Takayuki Kobayashi², Shinichi Motoyama², Shizuo Fujita¹ (1.Kyoto Univ., 2.SAMCO Inc.)

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