Sommawan Khumpuang

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 9:00 AM - 12:15 PM B10 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[16a-B10-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

12:00 PM - 12:15 PM

[16a-B10-13] Investigation of productivity in device process of minimal fab

〇Sommawan Khumpuang^1,2, Fumito Imura^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)