Kotaro Natori

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 9:00 AM - 12:15 PM B10 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[16a-B10-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

9:30 AM - 9:45 AM

[16a-B10-3] Photoelectron holography of As doped in Si

〇Kotaro Natori¹, Kazuo Tsutsui¹, Tomohiro Matsushita², Takayuki Muro², Toyohiko Kinoshita², Takuya Hoshii¹, Kuniyuki Kakushima¹, Hitoshi Wakabayashi¹, Fumihiko Matsui³, Masaru Shimomura⁴ (1.Tokyo Tech., 2.JASRI, 3.Nara Inst of Sci. and Technol., 4.Shizuoka Univ.)

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