Fumito Imura

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 1:45 PM - 5:00 PM B10 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[16p-B10-1~12] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

4:45 PM - 5:00 PM

[16p-B10-12] Fabrication of Half-Inch Size Package by Minimal Fab

〇Fumito Imura^1,2, Michihiro Inoue¹, Arami Saruwatari^1,2, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.Minimal Fab)