Miya Matsuo

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 1:45 PM - 5:00 PM B10 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[16p-B10-1~12] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

2:15 PM - 2:30 PM

[16p-B10-3] Transport Phenomena for Silicon Epitaxy in Minimal CVD Reactor

〇Miya Matsuo¹, Hitoshi Habuka¹, Ayami Yamada¹, Ning Li¹, Takanori Mikahara², Shin-ichi Ikeda^2,3, Yuuki Ishida^2,3, Shiro Hara^2,3 (1.Yokohama Nat. Univ., 2.MINIMAL, 3.AIST)

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