kazushige sato

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 1:45 PM - 5:00 PM B10 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[16p-B10-1~12] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

4:00 PM - 4:15 PM

[16p-B10-9] Characterization of p-MOS formed using the minimal furnace that irradiates a wafer with laser from the backside

〇kazushige sato¹, takashi chiba^1,3, masao terada^1,3, ikeda shinichi^1,2, Sommawan Khumpuang^1,2, shiro hara^1,2 (1.Minimal Fab Development Association, 2.AIST, 3.Sakaguchi E.H VOC Corp.)

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