Session information

Poster presentation

8 Plasma Electronics » 8.4 Plasma etching

[15p-P7-1~2] 8.4 Plasma etching

Thu. Sep 15, 2016 1:30 PM - 3:30 PM P7 (Exhibition Hall)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

+Add all to schedule

1:30 PM - 3:30 PM

[15p-P7-1] Effect of Oxygen Plasma Irradiation on AlGaN Surface Properties

〇Masahito Niibe¹, Retsuo Kawakami², Yoshitaka Nakano³, Ryo Tanaka¹, Yuma Araki¹, Chisato Azuma², Takashi Mukai⁴ (1.Univ. Hyogo, 2.Tokushima Univ., 3.Chubu Univ., 4.Nichia Corp.)

1:30 PM - 3:30 PM

[15p-P7-2] Monitoring of films deposited on inner walls of plasma etching chamber

〇Yuji Kasashima¹, Fumihiko Uesugi¹ (1.AIST)

Authentication

Please log in with your participant account.
» Participant Log In

▲