[13a-A25-1~11] 7.4 Buried interface sciences with quantum beam

[13a-A25-4] Toward Structure Analysis for Surface Microstrucrues with Sizes Less Than 100 nm Using an X-ray Grating Interferometer

〇Wataru Yashiro^1,2, Kosuke Kato³, Susumu Ikeda⁴, Yasuo Wada⁵, Yoshio Suzuki⁶, Akihisa Takeuchi⁶ (1.IMRAM, Tohoku Univ., 2.JST, ERATO, 3.GSE, Tohoku Univ., 4.AIMR, Tohoku Univ., 5.Keio Univ., 6.JASRI)

Keywords:X-ray imaging, grating, small-angle X-ray scattering

We developed a novel method of structure analysis for investigating surface and interface morphology by using an X-ray phase grating. In our method, we can obtain not only real-space maps of X-ray reflectivity but also those of small-angle X-ray scatteirng (SAXS), which arises from unresolvable microstructure in the lateral direction. Because our method can use a low-brilliance laboratory X-ray source, it will be widely used near future.