The 77th JSAP Autumn Meeting, 2016

Presentation information

Oral presentation

8 Plasma Electronics » 8.4 Plasma etching

[13a-B9-1~11] 8.4 Plasma etching

Tue. Sep 13, 2016 9:00 AM - 11:45 AM B9 (Exhibition Hall)

Keizou Kinoshita(PETRA)

9:15 AM - 9:30 AM

[13a-B9-2] Phase-resolved interelectrode distribution of electron density in afterglow of synchronized dc imposed pulsed plasmas for advance dielectric etching processes

Toshinari Ueyama1, Manabu Iwata2, Yusuke Fukunaga1, Takayoshi Tsutsumi1, Keigo Takeda1, Hiroki Kondo1, Kenji Ishikawa1, Makoto Sekine1, Yoshinobu Ohya2, Masaru Hori1, Hideo Sugai3 (1.Nagoya Univ., 2.Tokyo Electron MIyagi Ltd., 3.Chubu Univ.)

Keywords:etching, plasma, diagnostics