2:45 PM - 3:15 PM
[13p-B8-3] Control of point defects in Si wafer by ultrahigh-temperature RTP technique
Keywords:Cz-Si crystal, Rapid thermal processing, Point defect
Symposium (Oral)
Symposium » Recent topics of point defects in semicondoctor crystals
Tue. Sep 13, 2016 1:45 PM - 6:00 PM B8 (Exhibition Hall)
Toshiaki Ono(SUMCO), Kentaro Kutsukake(Tohoku Univ.)
2:45 PM - 3:15 PM
Keywords:Cz-Si crystal, Rapid thermal processing, Point defect