[13p-B8-1~10] Recent topics of point defects in semicondoctor crystals

[13p-B8-6] Defect reactions of hydrogen impurity with Cu₄ complex in silicon

〇Koun Shirai¹, Takayoshi Fujimura¹ (1.ISIR, Osaka Univ.)

Keywords:Cu complex

Cu complex Cu₄ is a quit stable defect formed in crystalline silicon. However, experiments show that this complex can be eliminated by hydrogenetion. The details of this process has not been known. The present study by DFT calculation shows that reaction of hydrogen with Cu₄ complex proceeds to form large complexes Cu_nH_m.