The 77th JSAP Autumn Meeting, 2016

Presentation information

Poster presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

[13p-P7-1~17] 6.4 Thin films and New materials

Tue. Sep 13, 2016 4:00 PM - 6:00 PM P7 (Exhibition Hall)

4:00 PM - 6:00 PM

[13p-P7-3] NbON thin films synthesized by VHF plasma for Visible Light-Responsive Photocatalysts

Hideaki Murase1, Misa MIyabe1, Hisao Nagai1, Ryosuke Kikuchi1, Toru Nakamura1, Kazuhito Hatoh1 (1.Panasonic)

Keywords:photocatalyst, plasma, nitridization

Intensive studies of Visible Light-Responsive Photocatalysts have been performed to achieve direct water splitting using solar energy. We have recently reported that n-type NbON thin films fabricated by RF reactive sputtering method shows a photocatalytic activity under visible light. In this study, we have successfully synthesized NbON thin films from Nb2O5 by VHF plasma nitridization method under near atmospheric pressure.