[13p-P7-1~17] 6.4 Thin films and New materials

[13p-P7-3] NbON thin films synthesized by VHF plasma for Visible Light-Responsive Photocatalysts

〇Hideaki Murase¹, Misa MIyabe¹, Hisao Nagai¹, Ryosuke Kikuchi¹, Toru Nakamura¹, Kazuhito Hatoh¹ (1.Panasonic)

Keywords:photocatalyst, plasma, nitridization

Intensive studies of Visible Light-Responsive Photocatalysts have been performed to achieve direct water splitting using solar energy. We have recently reported that n-type NbON thin films fabricated by RF reactive sputtering method shows a photocatalytic activity under visible light. In this study, we have successfully synthesized NbON thin films from Nb₂O₅ by VHF plasma nitridization method under near atmospheric pressure.