The 77th JSAP Autumn Meeting, 2016

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Oral presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[14a-A23-1~10] 6.1 Ferroelectric thin films

Wed. Sep 14, 2016 9:00 AM - 11:45 AM A23 (201B)

Shinya Yoshida(Tohoku Univ.), Tomoaki Yamada(Nagoya Univ.)

10:30 AM - 10:45 AM

△ [14a-A23-6] Change of crystal structure and properties with heat treatment in ferroelectric HfO2-based films

〇Takanori Mimura1, Takao Shimizu2, Hiroshi Uchida3, Takanori Kiguchi4, Akihiro Akama4, Toyohiko Konno4, Osami Sakata5, Hiroshi Funakubo1,2,6 (1.Tokyo Tech. IGS, 2.Tokyo Tech. MECS, 3.Sophia Univ. FST, 4.Tohoku Univ. IMR, 5.NIMS, 6.Tokyo Tech. DMSE)

Keywords:HfO2, ferroelectric film