[14p-P10-1~25] Joint Session K "Wide bandgap oxide semiconductor materials and devices"（Poster）

[14p-P10-10] Fabrication of α-Ga₂O₃ Thin Films on a-plane and m-plane Sapphire Substrates by Mist Chemical Vapor Deposition

〇Kazuaki Akaiwa¹, Katsuya Ota¹, Takahito Sekiyama¹, Tomoki Abe¹, Kunio Ichino¹ (1.Tottori University)

Keywords:Oxide Semiconductor, Gallium Oxide, Crystal Growth