[14p-P16-1~8] 7.3 Micro/Nano patterning and fabrication

▲ [14p-P16-5] Gas sensor based on ZnO film/ silica nanopillars

〇Jing Liu¹, Futing Yi¹ (1.BSRF, IIHEP, CAS)

Keywords:Nanopillar, Gas sensor, Zinc Oxide

Silica nanopillars are used as substrate for Zinc oxide (ZnO) gas sensor for the first time. The nanopillars with the large surface ratio can increase the quantity of sensitive material and the gas adsorption surface, which can improve the gas sensing performance obviously. Silicon nanopillars are fabricated by Cesium Chloride (CsCl) self-assembly lithography and inductively coupled plasma (ICP) dry etching as substrate, after oxidation, the ZnO film is deposited on the nanopillars surface by RF magnetron sputtering using ZnO ceramic target. XRD patterns of the nanopillar and planar substrates after ZnO film covering indicate that all the deposited films are polycrystalline. With this method, the nanopillar based gas sensor has the higher gas response, the shorter response and recovery time than the planar one under the same test conditions with different working temperatures, different gas concentrations for both ethanol and acetone.