The 77th JSAP Autumn Meeting, 2016

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Poster presentation

13 Semiconductors » 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[14p-P4-1~5] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

Wed. Sep 14, 2016 1:30 PM - 3:30 PM P4 (Exhibition Hall)

1:30 PM - 3:30 PM

[14p-P4-1] Adhesion behavior of metal contamination in the isopropyl alcohol

〇Kazuya Dobashi1, Misako Saito1 (1.Tokyo Electron Ltd.)

Keywords:Clean, Metallic Contamination