11:45 AM - 12:00 PM
[15a-B10-12] Convenient Evaluation of Fracture Strength of Titanium Film
Keywords:MEMS, Film, Strength
Presentation information
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology
[15a-B10-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology
Thu. Sep 15, 2016 9:00 AM - 12:15 PM B10 (Exhibition Hall)
Wenchang Yeh(Shimane Univ.), Tatsuya Okada(Univ. of the Ryukyus)