The 77th JSAP Autumn Meeting, 2016

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[15a-B10-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

Thu. Sep 15, 2016 9:00 AM - 12:15 PM B10 (Exhibition Hall)

Wenchang Yeh(Shimane Univ.), Tatsuya Okada(Univ. of the Ryukyus)

10:45 AM - 11:00 AM

[15a-B10-8] Performance Improvement of ELA Si junction solar cells by the surface anti-reflection film

Jin Suzuki1, Tianxi Yang1, Tatsuya Okada1, Takashi Noguchi1, Naoya Kawamoto2 (1.Ryukyu Univ., 2.Yamaguchi Univ.)

Keywords:solar cells, anti-reflection film, Excimer Laser