The 77th JSAP Autumn Meeting, 2016

Presentation information

Print

Oral presentation

13 Semiconductors » 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[15a-B10-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

Thu. Sep 15, 2016 9:00 AM - 12:15 PM B10 (Exhibition Hall)

Wenchang Yeh(Shimane Univ.), Tatsuya Okada(Univ. of the Ryukyus)

11:00 AM - 11:15 AM

△ [15a-B10-9] Evaluation of Poly-Si Thin Film Formation Process by Raman Spectroscopy

〇Takahiro Suzuki1, Ryo Yokogawa1, Kazuya Takahashi2, Katsuhiko Komori2, Tamotsu Morimoto3, Naomi Sawamoto1, Atsushi Ogura1 (1.Meiji Univ., 2.Tokyo Electron Tohoku Ltd., 3.Tokyo Electron Ltd.)

Keywords:Poly-Si Thin Film, Raman Spectroscopy