[15a-B10-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

△ [15a-B10-10] Evaluation of Nanostructure in Poly-Si Grain by Raman Spectroscopy

〇ryo yokogawa¹, Takahiro Suzuki¹, Ryota Suzuki¹, Kazuya Takahashi², Katsuhiko Komori², Tamotsu Morimoto³, Naomi Sawamoto¹, Atsushi Ogura¹ (1.Meiji Univ., 2.Development Dept., Tokyo Electron Tohoku Ltd., 3.Tokyo Electron Ltd.)

Keywords:poly-Si, Raman spectroscopy