[15a-B2-1~8] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[15a-B2-1] Water Flow between Wafers in Batch-Type Silicon Wafer Wet Cleaner

〇kento miyazaki¹, shogo okuyama¹, hitoshi habuka¹, akihiro goto² (1.Yokohama Nat. Univ., 2.Pre-Tech)

Keywords:Silicon wafer, Wet cleaning, Water flow

The water injection nozzle which has been designed by the numerical calculation was installed in the silicon wafer wet cleaning bath. The water flow was visualized in the bath. Particularly, the water motion between the wafers was focused on.