Characterization of Iron in Silicon by Low Temperature PL and DLTS Measurements

Presentation information

Oral presentation

15 Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

Thu. Sep 15, 2016 1:15 PM - 6:45 PM A23 (201B)

Takahiro Maeta(Global Wafers Japan), Takuto Kojima(Meiji Univ.), Yutaka Ohno(Tohoku Univ.)

4:45 PM - 5:00 PM

〇Minoru Nakamura¹, Susumu Murakami¹, Haruhiko Udono¹ (1.Ibaraki Univ.)

Keywords:silicon, iron, Photoluminescence