The 77th JSAP Autumn Meeting, 2016

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13 Semiconductors » 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[15p-B10-1~17] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

Thu. Sep 15, 2016 1:45 PM - 6:30 PM B10 (Exhibition Hall)

Minoru Sasaki(Toyota Tech. Inst.)

4:30 PM - 4:45 PM

[15p-B10-10] Structural changes of an organic film during observation by helium ion and secondary electron microscopes imaging

〇Shinichi Ogawa1, Tomohiko Iijima1 (1.AIST)

Keywords:helium ion microscopy, damage, organic film

Structural changes of an organic film during observation by helium ion and secondary electron microscopes imaging