[15p-B10-1~17] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[15p-B10-9] Fabrication of varifocal scanner with piezoresistive angle and focal length sensors

〇(D)Kenta Nakazawa¹, Takashi Sasaki¹, Hiromasa Furuta², Jiro Kamiya², Hideki Sasaki², Toshikazu Kamiya², Kazuhiro Hane¹ (1.Tohoku Univ., 2.Panasonic Industrial Devices SUNX)

Keywords:Varifocal mirror, Scanner, Piezoresistor

Varifocal scanner is an optical element which has a varifocal mirror and a scanner. The integration of the varifocal mirror with scanner enables to miniaturize and sophisticate optical systems. In previous research, we reported the varifocal scanner using the wafer bonding process, which enlarge the mirror diameter while maintaining the driving frequency band width. On the other hand, it is important to measure the focal length of the varifocal mirror and the angle of the scanner. In this presentation, we report the integration of the varifocal scanner with piezoresistive focal length and angle sensors.