[15p-B3-1~12] 13.2 Exploratory Materials, Physical Properties, Devices

△ [15p-B3-7] Annealing effects on conduction type in Mg₂Si thin films

〇Mao Kurokawa¹, Mutsuo Uehara¹, Takao Shimizu¹, Kensuke Akiyama^1,2, Masaaki Matsushima¹, Hiroshi Uchida³, Yoshisato Kimura¹, Hiroshi Funakubo¹ (1.Tokyo Institute of Technology, 2.Kanagawa Industrial Technology Center, 3.Sophia Univ.)

Keywords:magnesium silicide thin film, thermoelectric properties