The 77th JSAP Autumn Meeting, 2016

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[15p-B9-1~17] 13.3 Insulator technology

Thu. Sep 15, 2016 1:15 PM - 5:45 PM B9 (Exhibition Hall)

Tsutomu Tezuka(TOSHIBA), Toyohiro Chikyo(NIMS)

5:30 PM - 5:45 PM

[15p-B9-17] Investigation of GeO desorption in HfO2/GeO2/Ge stacks

〇Hiroyoshi Otake1, Tomo Ueno1, Yoshitaka Iwazaki1 (1.Tokyo Univ. of Agri. & Tech.)

Keywords:Germanium, GeO2, HfO2

HfO₂/GeO₂/Ge構造において、熱処理によるGeO脱離の調査を行う。