Polarization inhomogeneity due to local internal field in ferroelectric HfO<sub>2</sub> film

Presentation information

Oral presentation

13 Semiconductors » 13.3 Insulator technology

Thu. Sep 15, 2016 1:15 PM - 5:45 PM B9 (Exhibition Hall)

1:30 PM - 1:45 PM

〇Shigehisa Shibayama^1,2, Lun Xu¹, Xuan Tian¹, Shinji Migita³, Akira Toriumi¹ (1.The Univ. of Tokyo, 2.JSPS, 3.AIST)

Keywords:HfO2, ferroelectric, piezo-response force microscopy