[15p-P6-1~16] 8.3 deposition of thin film and surface treatment

[15p-P6-14] Effects of ZnO(N) thin film by inductively coupled plasma-assisted sputtering

〇Yuki Ishii¹, Seiya sakakibara¹, Tetsuya Kaneko¹, Kunio Okimura¹, Haruo Shindo¹, Maso Isomura¹ (1.Tokai Univ.)

Keywords:inductively coupled plasma, ZnO