[16a-B10-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[16a-B10-3] Photoelectron holography of As doped in Si

〇Kotaro Natori¹, Kazuo Tsutsui¹, Tomohiro Matsushita², Takayuki Muro², Toyohiko Kinoshita², Takuya Hoshii¹, Kuniyuki Kakushima¹, Hitoshi Wakabayashi¹, Fumihiko Matsui³, Masaru Shimomura⁴ (1.Tokyo Tech., 2.JASRI, 3.Nara Inst of Sci. and Technol., 4.Shizuoka Univ.)

Keywords:Photoelectron holography