Relationship between electric field and cluster transportation in downstream of multi-hollow discharge plasmas

Presentation information

Oral presentation

8 Plasma Electronics » 8.3 deposition of thin film and surface treatment

Fri. Sep 16, 2016 1:15 PM - 4:45 PM B7 (Exhibition Hall)

Kazunori Koga(Kyushu Univ.), Keiji Nakamura(Chubu Univ.)

2:30 PM - 2:45 PM

〇Takashi Kojima¹, Susumu Toko¹, Kimitaka Keya¹, Kazumaa Tanaka¹, Hyunwoohg Seo¹, Naho Itagaki¹, Kazunori Koga¹, Masaharu Shiratani¹ (1.Kyushu Univ.)

Keywords:a-Si:H, solar cell, cluster