WENHSIN CHANG

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 9:00 AM - 12:15 PM S422 (S4)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices and related technologies

[21a-S422-1~10] 13.5 Semiconductor devices and related technologies

11:30 AM - 11:45 AM

▼ [21a-S422-8] Realization of Ge n- and p-MOSFETs by using low thermal budget ionimplantation after germanidation technique (< 400 °C)

〇(P)WENHSIN CHANG¹, Hiroyuki Ota¹, Tatsuro Maeda¹ (1.AIST)