ryo yokogawa

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 1:45 PM - 6:45 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[20p-S423-1~19] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

5:30 PM - 5:45 PM

△ [20p-S423-15] Crystallinity Evaluation Profile of Low Temperature Polycrystalline Silicon Thin Film
Using Raman Spectroscopy and Imaging

〇ryo yokogawa¹, Kazuya Takahashi², Katsuhiko Komori², Yoshihiro Hirota³, Naomi Sawamoto¹, Atsushi Ogura¹ (1.Meiji Univ., 2.Tokyo Electron Tohoku Ltd., 3.Tokyo Electron Ltd.)