15:00 〜 15:15 ▲ [20p-S221-6] Anomalous Flatband Voltage Shift of AlFxOy/Al2O3 MOS Capacitors: Dipole Layer Formation at Dielectric Interfaces with Different Anions 〇(D)Fei Jiayang1、Kita Koji1 (1.The Univ. of Tokyo)