3:00 PM - 3:15 PM ▲ [20p-S221-6] Anomalous Flatband Voltage Shift of AlFxOy/Al2O3 MOS Capacitors: Dipole Layer Formation at Dielectric Interfaces with Different Anions 〇(D)Jiayang Fei1, Koji Kita1 (1.The Univ. of Tokyo)