Taro Hayakawa

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 9:30 AM - 11:30 AM P1 (Gymnasium)

Poster presentation
| 7 Beam Technology and Nanofabrication
| 7 Beam Technology and Nanofabrication（Poster）

[19a-P1-1~17] 7 Beam Technology and Nanofabrication（Poster）

9:30 AM - 11:30 AM

[19a-P1-10] Development of large scale ion sources with hollow cathode emitter

〇Taro Hayakawa¹, Tomokazu Nagao¹, Yutaka Inouchi¹ (1.Nissin Ion Equipment)