Yuan TU

Speaker, Author, Co-Author

Sat. Mar 19, 2016 9:00 AM - 11:45 AM S224 (S2)

Oral presentation
| 13 Semiconductors
| 13.6 Semiconductor English Session

[19a-S224-1~10] 13.6 Semiconductor English Session

9:00 AM - 9:15 AM

▲ [19a-S224-1] Distribution of Single-Ion Implanted Dopants in Silicon Investigated by Atom Probe Tomography

〇(D)Yuan TU¹, Bin Han¹, Yasuo Shimizu¹, Koji Inoue¹, Maasa Yano², Yuki Chiba², Takashi Tanii², Takahiro Shinada³, Yasuyoshi Nagai¹ (1.IMR Tohoku Univ., 2.Waseda Univ., 3.CIES Tohoku Univ.)

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