HARUKI TONOE

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 9:00 AM - 12:30 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[19a-S423-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

12:00 PM - 12:15 PM

[19a-S423-12] Characterization of wafer shape in minimal flatness tester

〇HARUKI TONOE¹, Yoshiaki Matsuhashi^1,2, Minoru Kamitomai^1,2, Kazuhiro Sato^1,2, Sommawan Khumpuang^1,3, Shiro Hara^1,3 (1.MINIMAL, 2.KURODA, 3.AIST)

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