Norio Umeyama

→ Search for Norio Umeyama in Google Scholar

Speaker, Author, Co-Author

Sat. Mar 19, 2016 9:00 AM - 12:30 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[19a-S423-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

10:30 AM - 10:45 AM

[19a-S423-7] Minimal Fab Process using High-Speed MP and CMP Machines

〇Norio Umeyama^1,2, Kazuhiro Koga^1,2, Fumito Imura^1,2, Kazutaka Shibuya³, Takayuki Fuse³, Yoshio Nakamura³, Kouichiro Ichikawa³, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL, 3.Fujikoshi Machinery)

▲