SHINYA MORITA

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 4:00 PM - 6:00 PM P12 (Gymnasium)

Poster presentation
| Joint Session K
| Joint Session K

[19p-P12-1~27] 21.1 Joint Session K

4:00 PM - 6:00 PM

[19p-P12-27] The Evaluation of Electronic State of Interface between a-IGZO and SiO_x Passivation Film Using Hard X-ray Photoelectron Spectroscopy

〇SHINYA MORITA¹, MOTOTAKA OCHI¹, KAZUSHI HAYASHI¹, TOSHIHIRO KUGIMIYA¹ (1.KOBE STEEL, LTD.)