TAKUMU HONDA

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 1:30 PM - 3:30 PM P4 (Gymnasium)

Poster presentation
| 13 Semiconductors
| 13.5 Semiconductor devices and related technologies

[19p-P4-1~17] 13.5 Semiconductor devices and related technologies

1:30 PM - 3:30 PM

△ [19p-P4-7] Study of Fabrication Processes for Si-MOS Quantum Dot Devices with Multi-Layered Al Gates Structure

〇TAKUMU HONDA¹, Jun Yoneda², Kenta Takeda², Takamasa Kawanago¹, Tetsuo Kodera^4,5, Seigo Tarucha^2,3,5, Shunri Oda¹ (1.QNERC-Tokyo Tech., 2.RIKEN, 3.The Univ. of Tokyo, 4.Tokyo Tech., 5.NanoQuine-The Univ. of Tokyo)

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