takatoshi watanabe

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 4:00 PM - 6:00 PM P6 (Gymnasium)

Poster presentation
| 8 Plasma Electronics
| 8.3 Deposition of thin film and surface treatment

[19p-P6-1~8] 8.3 Deposition of thin film and surface treatment

4:00 PM - 6:00 PM

[19p-P6-5] Surface Treatment of Semiconductor Emitter for Thermionic Energy Converter Using Oxygen Gas Mixture Plasma

〇takatoshi watanabe¹, Atsushi Hada¹, Kengo Inoue¹, Akihisa Ogino¹ (1.Shizuoka Univ.)